Annular İllumination |
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Prof. Dr. Sinsi
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Annular İllumination* 1 a technique utilized in certain steppers (see step and repeat and step and scan) whereby illumination is provided by a ring centered around the optical axis Annular or >off-axis illumination can increase resolution by allowing more diffraction orders into the lens system English Related Words* annular * annular area * annular barrel vault * annular coil clearance * annular eclipse * annular flow * annular gilt head * annular scotoma * annular section * annular spring * annular valve * annular vault * annularis * annularity * annularry |
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