Mikro Elektro-Mekanik Sistemler Referanslar

**Prof. Dr. Sinsi** · 08-20-2012

Referanslar

* M

C

Roco

"A Frontier for Engineering,"Mech

Eng

123, January, pp

52-55, (2001)

* M

Mehregany and S

Roy, Introduction to MEMS, 2000, Microengineering Aerospace Systems, El Segundo, CA, Aerospace Press, AIAA, Inc

, (1999)
* K

S

Chen, K

I

Lin, H

F

Ko, "Fabrication of 3D polymer microstructures using electron beam lithography and nanoimprinting technologies", Journal of Micromechanics and Microengineering, 15, 1894-1903, (2005)
* I

Z

Nikolay, What diffraction limit?, Nature Materials 7, 420 - 422 (2008)
* Matsumoto K, Ishii M, Segawa K and Oka Y,Room temperature operation of a single electron transistor made by the scanning tunneling microscope nanooxidation process for the TiOx/Ti system, Applied Physics Letters

68,34

(1996)
* Madou, M

(1997)Fundamentals of Microfabrication, CRC Press, Boca Raton, FL

* W

B

Song, J

J

Talghader

"Design and characterization of adaptive microbolometers", Journal of Micromechanics and Microengineering, 16, 1073-1079, (2006)
* W

Ehrfeld et al

"Fabrication of microstructures using the LIGA process", Proc

IEEE Micro Robots Teleoperators Workshop, (1987)
* F

M

White

"Fluid Mechanics 4th edn", (Boston, MA: McGraw-Hill), (1999)
* A

J

Tobin, R

E

Morel

"Asking about Cells", (Fort Worth, TX: Saunders), 1997
* K

L Ekinci, Y

T

Yang, M

L

Roukes, "Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems", Journal of Applied Physics, 95, 5, (2004)
* M

L

Roukes

"Nanoelectromechanical Systems", Tech

Digest

Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, (2000)

Kaynak : Wikipedia

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08-20-2012	#1
Prof. Dr. Sinsi	Mikro Elektro-Mekanik Sistemler Referanslar Referanslar * MC Roco "A Frontier for Engineering,"MechEng123, January, pp 52-55, (2001) * M Mehregany and S Roy, Introduction to MEMS, 2000, Microengineering Aerospace Systems, El Segundo, CA, Aerospace Press, AIAA, Inc , (1999) * K S Chen, K I Lin, H F Ko, "Fabrication of 3D polymer microstructures using electron beam lithography and nanoimprinting technologies", Journal of Micromechanics and Microengineering, 15, 1894-1903, (2005) * I Z Nikolay, What diffraction limit?, Nature Materials 7, 420 - 422 (2008) * Matsumoto K, Ishii M, Segawa K and Oka Y,Room temperature operation of a single electron transistor made by the scanning tunneling microscope nanooxidation process for the TiOx/Ti system, Applied Physics Letters68,34(1996) * Madou, M (1997)Fundamentals of Microfabrication, CRC Press, Boca Raton, FL * W B Song, J J Talghader "Design and characterization of adaptive microbolometers", Journal of Micromechanics and Microengineering, 16, 1073-1079, (2006) * W Ehrfeld et al "Fabrication of microstructures using the LIGA process", ProcIEEE Micro Robots Teleoperators Workshop, (1987) * FM White "Fluid Mechanics 4th edn", (Boston, MA: McGraw-Hill), (1999) * AJ Tobin, RE Morel "Asking about Cells", (Fort Worth, TX: Saunders), 1997 * KL Ekinci, YT Yang, M L Roukes, "Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems", Journal of Applied Physics, 95, 5, (2004) * ML Roukes "Nanoelectromechanical Systems", Tech Digest Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, (2000) Kaynak : Wikipedia