Annular İllumination

* 1a technique utilized in certain steppers (see step and repeat and step and scan) whereby illumination is provided by a ring centered around the optical axis Annular or >off-axis illumination can increase resolution by allowing more diffraction orders into the lens system
English Related Words* annular
* annular area
* annular barrel vault
* annular coil clearance
* annular eclipse
* annular flow
* annular gilt head
* annular scotoma
* annular section
* annular spring
* annular valve
* annular vault
* annularis
* annularity
* annularry